| Name |
Part# |
Description/ Equipment Model |
| ULPA Filter |
1A203066TL |
ULPA Filter |
| Unit Air Processor/ORION |
AP750G7SEMI |
TOK Style |
| Unit Elevat'n/Rotat'n Support |
FK15 |
SS8002-Transfer Robot Area |
| Unit Elevat'n/Rotat'n Support |
FK20 |
SS8002-Transfer Robot Area |
| Unit Robot/Refurbished |
RR304L120 |
Repair Only |
| Unit Wiring Protection Coater |
SP74 |
|
