| Name |
Part# |
Description/ Equipment Model |
| Screw Ball |
7200313A1 |
Ball Screw TR6132U Cassett U/D |
| Screw 3mm x 35mm SUS ALLEN |
3C35SHCS |
|
| Screw 3mm x 8 mm SUS ALLEN |
3C8SHCS |
|
| Screw AdjustmentN BSR Inline |
MR434021 |
BSR, PVC, DC Motor OBSOLETE |
| Screw Ball |
W0600MA1PYC3Z1 |
TR8171UD-TM |
| Screw Cup Adapter 5-6" |
790029001 |
Set of 3 (M3x8) -smaller chuck |
| Screw Cup Adapter 5-6" |
NFZ29002 |
Set of 3 (M3x10) -bigger chuck |
| Screw M3X4 6pcs. |
ST503 |
|
| Screw M3X5 6pcs. |
ST502 |
|
| Screw Nozzle Arm Cap Thumb |
ST267 |
|
| Screw PEEK Cup Adapter 8" |
790029002 |
Set of 3 (M3x10) |
| Screw Plastic Chemical Line |
M3X8L |
|
| Screw SUS Allen |
M4X10 |
TR8002 |
| Seal Brass Spacer |
720000271 |
Motor Vacuum/All Machines |
| Seal Spindle Motor Vacuum |
EMOR04026 |
|
| Secondary Solvent (SSL2) |
SP179 |
Secondary to Remote Cabinet |
| SECS I/II Application Software |
SDRDOS140 |
OBSLT - use SDRDOS140T |
| SECS I/II Application Software |
SDRDOS140T |
SDR Run Time License for DOS |
| SECS I/II Application Software |
SDRW4140T |
SDR FOR WINDOWS (FOR SK164) |
| SECS I/II Application Sotware |
ST753 |
TR6002/3 |
| SECS I/II Cmptr Monitor&Keybrd |
486DX266 |
Obsolete-AMDK63300, ST82320/22 |
| SECS I/II Communications |
SK164 |
|
| SECS I/II Communications |
SK164OLD |
|
| SECS I/II Computer |
ST754 |
|
| SECS I/II Hardware |
SP169 |
|
| SECS I/II Host Reset |
SP81032 |
|
| SECS I/II Interface Cable |
SECSCABLE |
Use for 6000 series |
| SECS I/II Serial Mode |
SP81033 |
|
| SECSII Communication |
SP81164 |
|
| SECSII Compatible |
SP81138 |
|
| Sensor 1L Allied Capactr Level |
ST824 |
TR6003, TR8001, TR8002 |
| Sensor 3x2mm SOG Flow (N.C.) |
ST215A |
Normally Closed |
| Sensor 3x2mm SOG Flow (N.O.) |
ST215 |
Normally Opened |
| Sensor 4x3mm Flow (N.C.) |
ST821A |
Normally Closed |
| Sensor 6x4mm Slvnt Flow (N.C.) |
ST219A |
Normally Closed |
| Sensor 6x4mm Slvnt Flow (N.O.) |
ST219 |
Normally Opened |
| Sensor Air Cylinder 1 ft lead |
DF9N |
D-F9N |
| Sensor Air Cylinder 10 ft lead |
DF9NL |
D-F9NL |
| Sensor Air Cylinder Walk Beam |
DB80A |
OBSLT: Please use DB80 |
| Sensor Aligner Optical |
E40021A |
|
| Sensor Auto Switch |
DC80 |
|
| Sensor Boat |
E32T51 |
E32-T51 for a TS8162FD |
| Sensor Box Air Velocity |
10160800 |
Integral; 7 Pin; New Style |
| Sensor Box Air Velocity |
10169500 |
Non-Integral; 7 pin |
| Sensor Box w/o Air Velocity |
10146600 |
7pin (Elec Int'l CE/EMC Confg) |
| Sensor Box w/o Air Velocity |
10356100 |
5 pin |
| Sensor Bulk Fill Float 2 |
ST81059 |
|
| Sensor Cassette |
BEWBE021A1 |
|
| Sensor Cassette |
PM2LH10 |
TR8002/SS8002 |
| Sensor Coater Cover |
GXL8H |
|
| Sensor Contact |
GXLN12F |
|
| Sensor Contact |
GXLN12F1 |
|
| Sensor Cool Plte Temp Measrmnt |
R5XPS206531605T |
R5X-P-S-2.0-65-316-0.5TF(01)+ |
| Sensor Cylinder |
DA80 |
|
| Sensor Digital Pressure |
AP31 |
Obsolete Use AP31K |
| Sensor Digital Pressure |
AP31K |
SS8002 |
| Sensor Digital Pressure |
AP32 |
Obsolete Use AP32K |
| Sensor Digital Pressure |
AP32K |
SS8002 |
| Sensor Digital Pressure |
AP33 |
Obsolete Use AP33K |
| Sensor Digital Pressure |
AP33K |
SS8002 |
| Sensor Dual Position EBR |
D90 |
D-90; use for 8171,6132/3 |
| Sensor Elevator Lift Assembly |
ST81285 |
TR8171 |
| Sensor Elvtr Lft/Cst Stg Asmbl |
ST81284 |
4 Snrs&Tfln Mntg Brckt, TR8171 |
| Sensor End Effector |
E32T24S |
SS8002-Transfer Robot |
| Sensor Fiberoptic Laser |
FSL71 |
|
| Sensor Head |
WSH300 |
TR8171UD TM |
| Sensor Humidity/Temp |
RHPB4T |
|
| Sensor Indexer Wafer Aligner |
RS114A |
|
| Sensor Integral Air Velocity |
10169800 |
7 pin; New Style |
| Sensor Leak Detection |
LSP10 |
TR8171 |
| Sensor Leak Detection |
LSP1C |
|
| Sensor Leak Detection |
LSP1CA |
Obsolete Use LSP1C |
| Sensor Leak Detection |
LSP20 |
Obsolete Use LSP60 |
| Sensor Leak Detection |
LSP60 |
SS8002-Cup |
| Sensor Leak Detection |
RS1000D |
|
| Sensor Magnetic Air Cylinder |
DB80 |
1 Ft Long |
| Sensor MicroPhoto |
EESPW311 |
SS8002-Cup Area |
| Sensor MicroPhoto |
EESPX303 |
SS8002 |
| Sensor MicroPhoto |
EESPY402 |
|
| Sensor Microphoto |
EESX473 |
SS8002-Transfer Robot |
| Sensor Microphoto |
EESX671 |
|
| Sensor Microphoto |
EESX672 |
|
| Sensor Microphoto |
PML53 |
|
| Sensor Optic |
SST810 |
SS8002 |
| Sensor Photo |
EESM3 |
|
| Sensor Photo |
EESM3B |
|
| Sensor Photo |
PML53B |
|
| Sensor Photo LS205 |
EESX472 |
|
| Sensor Pirany Vacuum |
WP02 |
|
| Sensor Plate |
C013A |
Chamber |
| Sensor Pressure |
MPRNSS4A |
OBSOLETE |
| Sensor Pressure |
VR320001 |
6001 old style OBSOLETE |
| Sensor Pressure He/N2 |
PS5102G |
|
| Sensor Rotary Actuator |
ZC153AHRAPS5 |
|
| Sensor Rotary Actuator TR6000 |
DA80H |
TR6000 Rotary Actuator Sensor |
| Sensor Shuttle Photo |
EESX471 |
|
| Sensor Switch |
LS411 |
|
| Sensor Vacuum |
PS3102V |
|
| Sensor Vacuum Pirany (WP-02) |
GP1000 |
|
| Sensor Waste Tank |
E0R051852 |
EE-SM3B Sensor w/ Wiring |
| Sensor, Thermo |
T3233 |
T-3233 Thermo-sensor |
| Servo Pack/Power unit upgrade |
CACRPR0UPGRADE6133 |
6133 |
| Shaft&LM Guide Asmbly M-Type |
ST81119 |
|
| Shft&LM Guide Asmbly 4" M-Type |
ST826 |
TR6132 |
| Shock Absorber |
FA12100MBC |
TR6133U |
| Shock Absorber |
FA1210MB25MBC |
|
| Shock Absorber Temp & Hum Hood |
B4612 |
TR8171 |
| Shuttle Mechanism 4"-5" |
ST025 |
|
| Shuttle Mechanism 5" |
ST800 |
TR8171 |
| Shuttle Mechanism 5" |
ST81278 |
|
| Shuttle Mechanism 5"-6" |
ST118 |
|
| Shuttle Mechanism 8" |
ST81287 |
Tufram |
| SL1:CR,CF,NR1,NR2 |
SL1FORMATB |
|
| SL1:CR,CF,NR1,NR2,BSR |
SL1FORMATA |
|
| SL1:CR,CF,NR1,NR2,BSR,EBR |
SL1FORMATC |
|
| SL2:EBR |
SL2FORMATA |
|
| SL2:EBR,BSR |
SL2FORMATB |
|
| Sleeve Waste Pipe Teflon |
EG1671 |
|
| Sleeve Waste Pipe Teflon |
ST571 |
|
| Slide Shaft LM Asmbl MType EBR |
ST600 |
|
| SMIF Hardware/Software |
SP81180 |
Integration |
| SMIF Integration |
SPS8018 |
Hardware Modification |
| SMIF Modification |
SP81183 |
Arm & Base Plate |
| Software 26 Wafer Slots Mod. |
SP81191 |
26 Wafer Slots Cassettes |
| Software Add/Process Flow |
SPS8016 |
SS8002 |
| Software Alarm Status Pole |
SP190 |
3 Light Modification/TR6132-3 |
| Software Bubble Sensor Assmbly |
ST82327 |
Samsung/TS8162FD |
| Software Chemical Monitor |
SP82031 |
|
| Software CupExhaust Error |
ST82330 |
CupExhaust Error Interlock |
| Software Dual Coat TAZMO |
SP81030 |
|
| Software EBR |
SPS8017 |
SS8002 |
| Software EBR P-ROM |
ST528 |
2pcs |
| Software Exhaust Monitoring |
SP81034 |
For National Semi |
| Software Flow Sensor Mod |
81SFTFLWSNSR |
Normally Closed (Sensor Type) |
| Software GEM SECS I/II |
SP82032 |
|
| Software GEM SECS I/II |
SPS8007 |
SS8002 |
| Software Interlock Mod |
SP191 |
TR6132UD |
| Software Interval Dspnse Timer |
SP40 |
TR6132 |
| Software Mdfn 5" to 6" CK |
ST81288 |
|
| Software Modification |
SP96 |
Order w/SP95,SP97 |
| Software Paper Leak Mod |
SP165 |
TR6132UD |
| Software Password Protection |
SP48 |
|
| Software Password Protection |
SP81126 |
|
| Software P-ROM 6" |
ST81223 |
TR8171-CNVN Kit |
| Software P-ROM 8" |
ST81108 |
|
| Software Rom Version |
R62830A |
TR6132 |
| Software Rom Version |
R62830B |
TR6132 |
| Software SECS 1/2 Equipment |
SP164 |
|
| Software Sensor (N.C.) |
ST82328 |
Normally Closed Sensor |
| Software SOG Level Monitor |
SP81148 |
|
| Software SSL |
ST552 |
TR6002/3 |
| Software Upgrade for Windows |
ST82326 |
SECS I/II Communication, Semix |
| Software Wafer Status |
SP81181 |
|
| Software Y2K Offline A |
ST82317 |
TR8132/52 |
| Software Y2K Offline B |
ST82319 |
TR8132/52 |
| Software Y2K Online A |
ST82316 |
TR8132/52 |
| Software Y2K Online B |
ST82318 |
TR8132/52 |
| Software/Exhaust Sensor |
ST82325 |
|
| Solenoid Valve |
SZ31605L0ZC4 |
|
| Solvent Facility Supply |
SPS8005 |
SS8272NH |
| Solvent Line Secnd Non-organi |
SSLKR6132 |
|
| Solvent Line Secnd Non-organi |
SSLKR6133 |
|
| Solvent Line Secnd to Remote C |
SP81179 |
|
| Solvent Line Secondary (SL2) |
SP80 |
|
| Solvent Single Auto Change |
SP81190 |
Solvent Single Auto Change |
| Spacer Arm End |
EC689 |
|
| Spacer for 350 Bakeplate |
ST467 |
|
| Spacer High Precision Regultr |
M0R04G1390 |
|
| Stand, Nozzle Receiver |
72C1545C1 |
|
| STANDARD LABOR A - TR6132/33 |
STANDARD LABOR A |
|
| Stand-Off Circuit Board Cover |
ST81234 |
|
| Stand-Off Hex M/F 6mmx3mm |
3C6H6MS |
OBSOLETE |
| Strip Six Terminal |
AYBN016 |
|
| Strip Ten Terminal |
AYBN0105 |
|
| Support wf Guide (Bottom) |
811109801 |
For Edge Hold EE1, SS Machine |
| Support wf Guide (Top) |
811109761 |
For Edge Hold EE1, SS Machine |
| Suppresser Surge |
ENB461K14A |
TS8162FD |
| Switch |
MHM3S70CB1S2 |
|
| Switch Cup Proximity |
E2KF10MC1 |
SS8002 |
| Switch Different PressEx Sens |
CL13291 |
|
| Switch Digital |
ISE4LB0125 |
|
| Switch Digital |
ZSE4B0125 |
|
| Switch Digital Pressure |
ISE4LEDT127L |
TS8162 |
| Switch Door |
D4DS25FS |
SS8002 |
| Switch Door Sensor Safety |
21001 |
SS8002 |
| Switch EMO |
ALFW2B222ODNR |
OBSOLETE |
| Switch EMO |
HW1BV401R |
SS8262N |
| Switch EMO (6132/3) red |
ABW402R |
|
| Switch Magnetic Sensor |
DB80L |
10 Ft Long |
| Switch Miniature Safety |
33007 |
SS8002 |
| Switch NEXT no LED |
TR101 |
|
| Switch Omron Keyed |
A165KA2ML1 |
A165K-A2ML-1 |
| Switch Omron Keyed |
A3GAK511C |
|
| Switch Photoelectric |
FU95 |
SS8002 |
| Switch Pressure (PSI) |
SPT204100GVMBE |
SPT204-100-G-VM-B-E |
| Switch Pressure Differential |
CL13291A |
Use CL13291 |
| Switch Pressure Release SOG |
VM1200130G |
VM120-01-30G |
| Switch Pushbutton EMO red |
ALW29902R24V |
|
| Switch Pushbutton/Off Button |
ABW102R |
|
| Switch Pushbutton/On Button |
ABW120G |
|
| Switch Remove |
TR221L2 |
|
| Switch Selector |
ASW3322 |
OBSOLETE |
| Switch Sensor |
CS7J |
TR6261HD |
| Switch Slight Different Manome |
DG87141 |
DG87-141(0-100mmH2O) |
| Switch Toggle |
M2019LG |
|
| Switch Toggle |
PW2029 |
6001 style OBSOLETE |
| Switch Transfer Robot Vacuum |
PS10102VH |
SS8002 |
| Switch w/LED Miniature 8p |
MHM2S5CB2S2 |
OBSOLETE |
| Switch w/LED Miniaturegreen 5p |
MHM3S5CB2S2 |
OBSOLETE |
| Switch w/LED Miniaturered 8p |
MHA2S4CB1S2 |
OBSOLETE |
| Switch w/LED Miniaturewhite |
MHA4S5CB2S2 |
OBSOLETE |
| Switch w/LED Miniatureyellow 8 |
MHA4S6CB3S2 |
OBSOLETE |
| Switch w/LED OP Panel |
TR301L2 |
|
| Switch w/LED red 5p |
MBM3S4B1S2 |
|
| Switch Walking Beam Air Cylind |
CS5TA |
ZCT01-A-PBDAS16 |
| System 8" Spin Coater |
TR8171UDTM |
|
| System 8" Spin Coater |
TR8171USE |
|
| System Spin Coater |
TR6132USE |
|
| System Spin Coater |
TR6133U |
|
| System Spin Coater |
TR6133UD(508) |
|
| System Spin Coater |
TR8132 |
|
| System Spin/Coat/Bake |
SS8132N |
|
| System Spin/Coat/Bake |
SS8242N(026) |
Vitesse (S/N 026) |
| System Spin/Coat/Bake |
SS8272NH(027) |
Medtronics (S/N 027) |
| System Used Spin Coater |
TR6101X |
|
| System Used Spin Coater |
TR8132USED |
|
