| Name |
Part# |
Description/ Equipment Model |
| Magnet Catch |
C1073 |
C-107-3 |
| Magnet Door 6001 |
22174 |
|
| Manifold Chemical |
C032A |
Chamber |
| Manifold Chemical PPS |
MR4C1902D2 |
|
| Manifold Exhaust |
MFS5PC1C4 |
TR8171UD TM |
| Manifold Gas Line |
MR4G07571 |
MR4-G0757-1 |
| Manifold Pressure Gauge |
MR4G08631 |
MR4-G0863-1 |
| Manifold Pressure Switch |
MR4G07761 |
MR4-G0776-1 |
| Manifold Small |
C028A |
Chamber |
| Manifold Solenoid Vlve Plug-in |
SS5Z308MS03 |
SS8002 |
| Manifold Solenoid Vlve Plug-in |
SS5Z314MS01 |
SS8002 |
| Manifold Solvent PVC |
ST401 |
|
| Manifold Solvent Teflon |
ST542 |
|
| Manifold Waste Drain PPS |
ST82272 |
For TR8002 |
| Manifold Wst Drain Pipe PVCSTD |
MR4G2887C1 |
|
| Manual SS8132N Operation |
MANOSS8132N |
|
| Manual SS8132N Training |
MANTSS8132N |
|
| Manual TR6132U Operation |
MANO6132U |
|
| Manual TR6132U Training |
MANT6132U |
Do Not Use |
| Manual TR6132U/6133U Training |
MANT6133U |
|
| Manual TR6133 SECS Training |
MANT6133SEC |
|
| Manual TR6133U Operation |
MANO6133U |
Obsolete - use MANO6133UD |
| Manual TR6133UD Operation |
MANO6133UD |
|
| Manual TR8132 Operation |
MANO8132 |
|
| Manual TR8132 Robot |
MANR8132 |
Operations Manual |
| Manual TR8132 Training |
MANT8132 |
|
| Manual TR8162 Operation |
MANO8162 |
|
| Manual TR8162 Training |
MANT8162 |
|
| Manual TR8171 Robot |
MANR8171 |
Robot Manual |
| Manual TR8171 SECS Training |
MANT8171SEC |
TR8171UD-TM |
| Manual TR8171UDT Operation |
MANO8171UDTM |
|
| Manual TR8171UDTM Training |
MANT8171UDTM |
|
| Memory Module |
PLEM000 |
|
| Meter Cup Flow |
FMPF200UNMTPU01 |
SS8002 |
| Meter Flow |
FCSQ3011B10BS02 |
SS8002 |
| Meter Flow |
FMPX20G22B3004M |
SS8002 |
| Meter Flow 10-100cc/min Teflon |
F9343688 |
|
| Meter Flow 10-100cc/min Viton |
G219 |
for In-Line Cup Rinse OBSOLET |
| Meter Flow 10-100cc/min Viton |
K217049 |
OBSOLETE/USE 810359421 |
| Meter Flow 10-100ml/min Viton |
810359421 |
|
| Meter Flow 20-200cc/min Teflon |
P700IU |
|
| Meter Flow 3-30 L/min Viton |
SK21003 |
|
| Meter Flow 3-30cc/min Viton |
K3811 |
part SK21003 replaces |
| Meter Flow 3-30L/min Teflon |
P710U0 |
|
| Meter Flow 5-50cc/min Teflon |
P710U0A |
|
| Meter Flow 5-50cc/min Viton |
550CCMIN |
|
| Meter Flow 5-50cc/min Viton |
T232ETHYL50 |
|
| Meter Flow EBR w/ Sens |
SP82028 |
|
| Meter Flow PRE FLUOR/SK20970 |
S26592 |
|
| Meter Flow Single BSR w/ Sens |
SP82025 |
|
| Meter Manometer (0-100mm) |
FR51HVT |
Obsolete Use DG87141 |
| Mod Power Supply LPT SMIF |
SPS8003 |
SS8272NH |
| Monitor 9" Monochrome |
ST82322 |
SECS I/II Communication Kit |
| Monitor CD-E2 Loop |
1230503 |
|
| Motor |
PK543BNTG20 |
|
| Motor AC Servo |
BA10BA32CAADNHF |
for EBR Arm |
| Motor AC Servo |
BC10CA52CACHNHB |
for Robot Rotation |
| Motor AC Servo |
BC30CA52CACDNH |
|
| Motor AC Servo |
BC30CA52CAN |
for Robot Elevation |
| Motor AC Servo |
HAFE13 |
for Robot Transfer |
| Motor AC Servo |
P50B05008DXS501 |
SS8002 - Loading Robot Area |
| Motor AC Servo |
USAHEM03CB2XA |
|
| Motor AC Servo |
USAHEM03CB2XB |
|
| Motor AC Servo 6133 |
ST722USE |
Refurbished Unit |
| Motor AC Servo 6133 |
USAHEM01TL31 |
|
| Motor AC Servo Pack |
ST81014 |
Obsolete/Use CACRPROKA3BU |
| Motor AC Servo TR6132U 100W |
USAHEM01TL11 |
|
| Motor Align Unit Stepping |
PX244M01AA |
TR8001 |
| Motor DC Spindle Unit |
TS678N14E33 |
TR6131 |
| Motor Elevation Rotation Servo |
P20B10150DCS00 |
SS8002-Transfer Robot Area |
| Motor Small Mega Torque |
MJS2014FN001AA1 |
SS8002 M-JS2014FN001AA13 |
| Motor ST133 Use/Repaired |
ST133USE |
|
| Motor ST81015 Used/Repaired |
USAHEM03CB2XUSE |
Repaired TR8171 motor |
| Motor ST82286 Used/Repaired |
ST82286USE |
|
| Motor Stepping |
CSK543BPTG20 |
SS8002 |
| Motor Stepping |
PH26601 |
2 Phase DC 6V |
| Motor Stepping |
PH26601GKC45 |
2 Phase DC 6V |
| Motor Stepping |
PK24301A |
PK243-01A |
| Motor Stepping (2-phase) |
CSK243APSG36 |
CSK243AP-SG3.6 for TR8171 |
| Motor Stepping Elevator Up/Dn |
BEMTPH264M31C25 |
Includes Wiring Conector |
| Motor Tranfer Robot Linear |
LA1005037501221 |
SS8002 - 2 axis |