| Description |
Part# |
Description /
Equipment Model |
| AC Servo
(Upgrade) |
DR203BDY111 |
|
| Actuator Cup Exhst Valv Rotary |
CRB1BW2090S |
|
| Actuator Elevation Thin Rotary |
CDRQBW15180D97 |
SS8002 |
| Actuator Interlock Flat |
21014 |
SS8002 |
| Actuator Nozzle Thin Rotary |
CDRQBS20180CA73 |
SS8002-CDRQBS20180CA73HL |
| Actuator Rotary |
CDRQBWI590 |
|
| Actuator Rotary |
HRAPS590DS |
|
| Actuator Thin Rotary |
CDRQBS15180D97 |
SS8002 |
| Adapter Arm SMIF |
SPS8002 |
SS8272NH |
| Adapter Cup 5-6" |
MR4C1158 |
Use
w/ PEEK Chuck |
| Adapter Cup 8" |
ST81113 |
Use
w/ PEEK Chuck |
| Adapter Fluorex Solvent Filter |
CW000042014 |
3
pc set, 1/4" OBSOLETE |
| Adapter PEEK Chuck Cup 5-6" |
MR4C11582 |
PE,
AC Servo Motor OBSOLETE |
| Adapter PVC Cup 5-6" |
MR4C11541 |
TR8171
AC Motor |
| Air Cylinder |
BDAS16X30CS5TA2 |
|
| Air Cylinder |
CDQ2B1210DC8AXB9 |
|
| Air Cylinder |
CDQSWB165DF9N |
|
| Air Cylinder |
CDQZB20400CA803 |
|
| Air Operated Valve |
AMB0265 |
|
| Aligner 5" Disc |
ST803 |
TR8171 |
| Aligner 5" Disc |
ST81281 |
TR8171 |
| Aligner Post Unit |
RA101A004 |
|
| Aligner Sensor Unit |
ST801 |
|
| Aligner Sensor Unit |
ST81279 |
|
| Aligner ST81125 Used/Repaired |
ST81125USE |
|
| Aligner w/Wiring Harness 6" |
ST81100 |
|
| Aligner w/Wiring Harness 8" |
ST81107 |
Pre-Coat |
| Amplifier |
PST1 |
SS8002 |
| Amplifier |
PST2 |
SS8002 |
| Amplifier End Effector |
FSM1 |
SS8002-Transfer
Robot |
| Amplifier Fbr Photoelec. Swtch |
FS262 |
SS8002 |
| Amplifier Int Photoelec. Swtch |
PZ51L |
SS8002 |
| Amplifier Leak Detector |
LS25 |
SS8002 |
| Amplifier Sep Photoelec. Swtch |
PS202 |
PS2-02/SS8002 |
| Arm |
811090872 |
For
Edge Hold EE1, SS Machine |
| Arm End Spacer |
72C006891 |
Drawing
Number EC689/TR8171 |
| Arm Left Wafer Mapping |
72E0778F1 |
TR8132/52 |
| Arm Nozzle Asmbl 6" M-Type EBR |
ST599 |
|
| Arm Nozzle Asmbly & EBR |
ST523 |
OBSOLETE |
| Arm Nozzle Asmbly 5" M-Type |
ST81243 |
|
| Arm Nozzle Asmbly 5" M-TypeEBR |
ST655 |
|
| Arm Nozzle Asmbly 6" M-Type |
ST81198 |
|
| Arm Nozzle Asmbly 8" M-Type |
ST81118 |
|
| Arm Nozzle Asmbly TR6132 |
ST697 |
|
| Arm Nzzle Asmbly 4" M-Type EBR |
ST825 |
TR6132 |
| Arm Right Wafer Mapping |
72E0778F2 |
TR8132/52 |
| Arm Shuttle Unit 1 Lower |
TS82SA1 |
TS8162FD
8 inch SA1 |
| Arm Shuttle Unit 2 Lower |
TS82SA2 |
TS8162FD
8 inch SA2 |
| Asmbly Bake Plate Exhaust Mod |
SK121 |
TR8152C |
| Asmbly IPA Bulk Fill Mod |
SK122 |
TR8171UD-TM |
| Assembly Fee for Caps |
ASSEMBLY
FEE |
Ritchie
Machine Assembly |
| Assmbly Air Duct Modification |
SK821 |
SS8272NH |
| Assmbly Valve Threadless Mod |
SK187 |
TR6132U |
| Assmly Bubble Sensor Instal |
500034031 |
TS8162FD/Samsung |
| Bake Controller |
D100FVN*DNNN5N |
SS |
| Bakeplate Glass Cover |
72B006391 |
|
| Bank Solenoid |
MN45080C4T3084 |
Chamber |
| Bar Lock Out Box Panel Mount |
ST81236 |
OBSOLETE |
| Bar Wafer Resting |
7203032A1 |
TR6132 |
| Bar Wafer Resting |
7203032A2 |
TR6132 |
| Battery CPU |
351FTP |
61316261 |
| Battery Lithium |
TL2100AAP |
L1,
64K MEMORY |
| Bearing |
L190ZZ |
TR8002 |
| Bearing |
LF1680HH |
TR8002 |
| Bearing Ball |
6000ZZ |
|
| Bearing House |
EC687 |
|
| Bearing Linear |
LM8MUU |
|
| Bearing Linear Disp Noz Asmbly |
LR8 |
|
| Bearing LM Ball |
LM10UU |
19mm/TR6132UD |
| Bearing Micro |
605ZZ |
TR6132 |
| Bearing Micro |
LF1910ZZ |
TR8002/SS8002 |
| Bearing Miniature |
698ZZ |
SS8002 |
| Bearing Miniature |
FL608ZZ |
SS8002-Nozzle
Head Area |
| Bearing Miniature |
FL684ZZA |
SS8002 |
| Bearing Miniature |
FL695ZZ |
SS8002 |
| Bearing Miniature |
WBC410ZZA |
SS8002 |
| Bearing Plastic |
567101506 |
TR6002/3 |
| Bearing Precision Linear Slide |
BSP1530SL |
22mm
Max. stroke |
| Belt Large 8171 |
B100S5M |
|
| Belt Small 8171 |
B100S5M260 |
|
| Belt Timing |
015DT5600EF |
TR8002 |
| Belt Timing |
110XL037U |
|
| Belt Timing |
130XL050 |
|
| Belt Timing |
140XL037 |
|
| Belt Timing |
160XL0371 |
|
| Belt Timing |
240XL037 |
|
| Belt Timing |
24955GT25 |
SS8002 |
| Belt Timing |
4755M15 |
TR8002 |
| Belt Timing |
512XL037 |
|
| Belt Timing |
564XL037 |
|
| Belt Timing 8171 |
037XLAL |
T3
(long) |
| Belt Timing Shuttle Fork 1 |
XL037U |
|
| Block 60° Front Hinge |
ST812 |
|
| Block Coater Cover Interlock |
ST154 |
OBSOLETE |
| Block Edge Hold |
811090853 |
For
Edge Hold EE1, SS Machine |
| Block Edge Hold |
811090854 |
For
Edge Hold EE1, SS Machine |
| Block Hinge A (Front) |
EC690 |
Block
Hinge A Nozzle Arm-Front |
| Block Hinge B (Rear) |
EC691 |
Block
Hinge B Nozzle Arm-Rear |
| Block Mount Robot Cover |
ST81221 |
OBSOLETE |
| Block Nozzle Arm Mount |
ST81237 |
|
| Block Rear Hinge |
ST811 |
|
| Board Alarm |
E0R051562A |
Tazmo |
| Board Alarm |
E0R053108B |
Tazmo |
| Board Alarm |
E0R054044B |
|
| Board Alarm Temp. Detect |
E0R051625A |
Tazmo |
| Board Alarm Temp. Detect |
E0R051625F |
Tazmo |
| Board Alignment Sensor LED |
810073611 |
|
| Board ARC Net |
E0R0511167 |
Tazmo |
| Board Bake Temp. Display |
E0R04113B |
Tazmo
6001 OBSOLETE |
| Board Bubble Sens Ver 2.2 |
ST799 |
|
| Board Bubble Sensor Interface |
E0R0513610A |
TR8132/52,TR8171,TS8162 |
| Board Change Over |
205072701 |
|
| Board Coat Function Control |
E0R054486 |
|
| Board Coat Function Switch |
E0R052979B |
TR6132/3 |
| Board Connector |
E0R055592 |
|
| Board Converter |
E0R052708 |
|
| Board Converter |
E0R052708A |
Tazmo |
| Board Converter |
E0R052708B |
TR8171 |
| Board Cool Plate Controller |
E0R053310 |
|
| Board CPU |
E0R051031B |
Tazmo |
| Board CPU |
E0R0518376A |
SS8002 |
| Board CPU |
E0R0518377A |
SS8002 |
| Board CPU |
E0R052160 |
Tazmo |
| Board CPU |
E0R0531918 |
SS8002 |
| Board CPU |
E0R055555C1 |
|
| Board CPU 1 & 2 |
ASBC2862B |
Obsolete
use ASBC2862C |
| Board CPU 1 & 2 |
ASBC2862C |
Updated
Version |
| Board Display Bake |
E0R052702 |
Tazmo OBSOLETE |
| Board Dual Sensor |
E0R04203 |
Tazmo |
| Board Dual Sensor |
E0R051163 |
Tazmo |
| Board EL Drive |
E0R052846 |
Tazmo |
| Board Encoder Input |
E0R0512703 |
E0R05-12703 |
| Board I/O |
E0R051032A |
Tazmo |
| Board I/O |
E0R052023A |
|
| Board Indexer Control Unit 1 |
E0R05123831 |
|
| Board Indexer Control Unit 2 |
E0R05123832 |
|
| Board Interconnect |
E0R052976 |
Tazmo |
| Board Isolated I/O 32 pt. |
E0R057586A |
Obsolete
use E0R057586B |
| Board Isolated I/O 32 pt. |
E0R057586B |
Revision
B |
| Board Isolation |
E0R051777 |
TR8171 |
| Board Keyboard Interface |
E0R051838 |
|
| Board Laser Detect/Drive Unit |
E0R0570537052 |
|
| Board LCD Control |
E0R051813 |
Tazmo |
| Board Limit Sensor |
SHREH8920 |
Tazmo |
| Board Memory |
E0R052710 |
64K
Byte w/ Battery |
| Board Memory w/ Battery |
ASBC1103A |
|
| Board Multibus |
ST81173 |
TR8171 |
| Board Operation Key |
E0R051089A |
Tazmo |
| Board Operation Switch |
E0R051028 |
Tazmo |
| Board Operation Switch |
E0R0513548 |
TR6133U |
| Board Operation Switch |
E0R053249 |
TR6132U |
| Board Operation Switch Used |
E0R053249U |
|
| Board Oscillator |
E0R051779B |
Tazmo |
| Board Oscillator |
E0R052661B |
E0R052661A
or B |
| Board Photo Emission LED |
510003481 |
w/Alignment
Sensor LED Board |
| Board Power Supply |
E0R051029A |
Tazmo |
| Board Power Supply |
E0R0532440 |
SS8002 |
| Board Power Supply Control |
LWQ2005224 |
|
| Board Pulse Generate Contl |
E0R0517895A |
E0R05-17895A |
| Board Pulse Generator |
E0R0512098 |
|
| Board Pulse Motor Driver |
E0R051068C |
Tazmo |
| Board Quartz |
TSBT810 |
TS002 |
| Board Receiver Sensor |
E0R0531917 |
SS8002 |
| Board Receiving Wafer Counting |
E0R051039R |
Tazmo
6001 OBSOLETE |
| Board Relay Alarm Pole |
E0R055370 |
Signal
Tower Relay Board |
| Board Sensor |
BEWBE021A2 |
BEWB-E021A-2 |
| Board Sensor |
BEWBE044C |
BEWB-E-044C |
| Board Sensor Mounting |
ER40199 |
|
| Board Serial Communication |
ST81029 |
|
| Board Shuttle Fork Brake |
ER5183411 |
TR8171 |
| Board Single Sensor |
E0R04199 |
Tazmo |
| Board SPI |
E0R051656A |
Tazmo |
| Board Spindle Motor 6001DC |
E0R051085B |
|
| Board ST101 Used/Repaired |
E0R051072E |
|
| Board Sub |
BEWBE024A10 |
Tazmo |
| Board Sub CPU |
E0R051072E3 |
w/
2 EPROM's |
| Board Sub CPU |
E0R051072F |
Obsolete
- Use E0R051072F3 |
| Board Sub CPU |
E0R051072F3 |
w/
1 EPROM |
| Board Sub EPC |
ER53456S |
8162 |
| Board Sub I/O |
E0R051073C |
Tazmo |
| Board Sub I/O Expansion |
E0R051254 |
Tazmo |
| Board Supplied Wafer Counting |
E0R051039S |
Tazmo
6001 OBSOLETE |
| Board Temperature Control |
E0R051087A |
Tazmo |
| Board Terminal Control |
E0R051812 |
Tazmo |
| Board Y2K BIOS |
ST823 |
TR6002/3 |
| Board, I/O |
DSB548S |
DSB-548S,
TR8171 Serial # 18 |
| Bolt CQ2 Sensor Mounting |
BQ1 |
|
| Bolt Tie Rod |
VVQ1000105A310 |
Kit
(10 Station) |
| Bottle 1 Gallon |
B7510128 |
|
| Bottle 1000cc OCD |
ST274 |
|
| Bottle 100cc OCD |
ST213 |
|
| Bottle 10L PE Waste |
104701 |
SF8001 |
| Bottle 10L PE Waste |
4501401 |
SS8002/45-014-01 |
| Bottle 10L PP |
ST81083 |
|
| Bottle 10L PP Waste |
STS8001 |
SS8002 |
| Bottle 125cc |
16057062 |
|
| Bottle 1L NM |
16057142 |
16057-142 |
| Bottle 200cc OCD |
ST214 |
|
| Bottle 250cc |
16057109 |
|
| Bottle 2L |
16129630 |
16129-630 |
| Bottle 2L |
B75532 |
B75532-Obsolete,
Use 16129630 |
| Bottle 500cc |
16057120 |
|
| Bottle 500cc OCD |
ST307 |
|
| Bottle 500ml Start-Up Kit Wash |
B77014 |
|
| Bottle 5L SUS Waste |
SP54 |
|
| Bottle 5L Waste |
ST295 |
|
| Bottle Holder 100cc OCD |
ST340 |
OBSOLETE |
| Bottle Holder 125cc |
ST343 |
|
| Bottle Holder 1L |
ST688 |
|
| Bottle Holder 250cc |
ST342 |
|
| Bottle Holder 500cc |
ST341 |
|
| Bottle Holder 500ml OCD |
ST770 |
OBSOLETE |
| Bottle Hvy Duty HDPE WM 1L |
16129607 |
|
| Bottle Teflon 250ml NM |
16071085 |
|
| Bottom Lid |
C006A |
Chamber |
| Bottom Plate |
C001A |
Chamber |
| Box Sensor CDE 5-Pin |
1271001 |
|
| BRACKET |
10335600 |
|
| Bracket 6" End Effctr Mounting |
MR4H1537C2 |
|
| Bracket 8" End Effctr Mounting |
MR4H1537C3 |
|
| Bracket CD300 Snsr Box Mountng |
ST82057 |
OBSOLETE |
| Bracket Din Rail Mounting |
VVQ100057A3 |
|
| Bracket Dispense Vlve Mounting |
ST728 |
|
| Bracket Exhaust Manifold |
ST81219 |
OBSOLETE |
| Bracket Flow Sensor |
NISYC313 |
OBSOLETE |
| Bracket L Shape Bubble Sens Mo |
ST807 |
OBSOLETE |
| Bracket Mounting SOG Filter |
ST839 |
Black/TR6133 |
| Bracket Roller Support |
MR441441 |
w/Mounting
Screws |
| Bracket SOG Filter Blue |
ST828 |
TR6002/3,
TR8001, TR8002 |
| Bracket SOG Filter Red |
ST829 |
TR6002/3,
TR8001, TR8002 |
| Bracket SOG Mounting Filter |
ST684 |
|
| Bracket Solvent Filter |
ST306 |
|
| Brake Dry/Neg Action Magnetic |
RNB02G |
SS8002 |
| Breaker 40 AMP Circuit |
EG53B4015MAX |
TR8171/
EG53B/40-15MA-X |
| Breaker Shunt Trip |
EG33A |
|
| BSR PPS w/Tube |
72C0941B3 |
|
| Buffer |
DMR4B10421 |
|
| Buffer Bake Plate |
82BUFFBP |
Temperature
Test |
| Bulk IPA Supply System w/o Cab |
SP81178 |
|
| Bulk IPA System w/Remote Cab |
SP81177 |
|
| Bushing Air Fitting |
M5B |
|
| Bushing ETP |
ETPK8 |
TR8002 |
| Bushing Gold |
C004A |
Chamber |
| Bushing Teflon |
C005A |
Chamber |
| Button Alarm 1 Green |
ST499 |
|
| Button Alarm 2 Red |
ST500 |
|
| Button Blank |
ST81262 |
Obsolete
use TZ0412 |
| Button Blank Display |
TZ0412 |
|
| Button Line |
ER5135367 |
ER5-13536-7 |
| Button OP Panel Start/Stop |
ST634 |
White |
| Button Panel Alarm Off |
ST494 |
|
| Button Panel Home |
ST495 |
|
| Button Panel Next (WHITE) |
TZ0312 |
|
| Button Panel Pause |
ST574 |
|
| Button Panel Recipe Time |
ST577 |
|
| Button Panel Remove |
TZ0106 |
Blue |
| Button Panel Start |
ST496 |
|
| Button Panel Start/Stop |
ST575 |
|
| Button Panel Stop |
ST497 |
|
| Button Panel Timer |
ST576 |
|
| Button Pushbutton Round Flush |
ABW1BG |
|
| Button Pushbutton Round Flush |
ABW1BR |
|
| Button Recipe Time |
ST81266 |
|
| Button Strt/Stp w/light indica |
ST81269 |
|
| Cabinet Facility Solvent |
SPT1063 |
|
| Cable 12 Meter Power |
ST82711 |
22
pcs/SS8282NH |
| Cable 6p Connector Elevator |
ST116 |
TR6133U |
| Cable AC Line |
ST81286 |
TR8171 |
| Cable Assembly (CD200) |
10149901 |
|
| Cable Cassette Detect Sensor |
ST82713 |
TR6132 |
| Cable CDE 50' |
1273050 |
|
| Cable CDE 70' |
1273070 |
|
| Cable Chuck Sensor |
T3 |
For
TR8171UD-TM |
| Cable Edge Rinse |
SEM01590910 |
|
| Cable Elevator |
ES4 |
TR6132
10w/10p Connectors |
| Cable Elevator |
ST582 |
TR6132
8w/10p Connectors |
| Cable Elevator Flat |
HHREH9611055 |
HHRE-H961-1-055 |
| Cable Elevator Sensor |
ST82712 |
TR6132 |
| Cable Fiber Optic 1.9m Long |
FSL51 |
For
TR8132 system |
| Cable Flat Ribbon |
ST328 |
100
Ft, Lt Blue |
| Cable IDI Pump |
ST82844 |
SS2 |
| Cable RB1, P2 Rotation |
ST82RB1CABLER |
Use
for TR8002 |
| Cable RB1, P2 Rotation & U/D |
ST82RB1CABLERUD |
Use
for TR8002 -Rotation & U/D |
| Cable RB1, P2 Transfer |
ST82RB1CABLET2 |
2
Indexer, Use for TR8002 |
| Cable RB1, P2 Transfer |
ST82RB1CABLET4 |
4
Indexer, Use for TR8002 |
| Cable RB1, P2 Up/Down |
ST82RB1CABLEUD |
Use
for TR8002 |
| Cable Robot |
MC002SS26 |
SS8002 |
| Cable Robot 3 Elevation |
ST82710 |
Samsung |
| Cable Robot 3 Elevation |
ST840 |
Samsung |
| Cable Robot Transfer |
ST81167 |
TR8171 |
| Cable Robot Transfer New |
ST81212 |
TR8171/New
Style |
| Cable Robot Under |
UNDERCABLE |
Old
Style/Use for TR8171 |
| Cable Robot Under New |
UNDERCABLENEW |
New
Style/Use for TR8171 |
| Cable Robot Upgrade |
ROBOTCABLE |
Obsolete
Use ST81212 |
| Cable Send/Rcv Transfer Chuck |
ST581 |
Use
with ST027/ST028 |
| Cable Stop Position Sensor |
ST82714 |
TR6132 |
| Cable U-Turn Transfer Chuck |
ST327 |
|
| Cable, Interface for 550, 25ft |
2105165 |
2-105-165 |
| Canister 3 Gln (Obsolete) |
SP89 |
Obsolete
use SP89GO or SP89YB |
| Canister 3 Gln Kalrez Solvent |
SP85 |
Yellow
and Black Disconnects |
| Canister 3 Gln Kalrez Solvent |
SP89GO |
Green
& Orange Connectors |
| Canister 3 Gln Kalrez Solvent |
SP89YB |
Yellow
& Black Connectors |
| Canister 3 Gln Solvent |
APC8203T304 |
Obsolete; Use BAS219403 |