The TR6003 Series Spincoat/Bake System successfully solved the contamination and repeatability problems associated with the sensitive Spin-on-Glass (SOG)/Spin-on-Dielectric (SOD) chemical and thus was instrumental in the acceptance of SOG/SOD processing as a proven and viable production process for planarization. Over 450 of these SOG/SOD systems are currently in operation worldwide, making them the most widely used and liked system available for SOG/SOD processing today.
The overwhelming popularity of the TR6003 Series is due to its high reliability and repeatability. Excellent uptime, high throughput and clean uniform processing both wafer-to-wafer and lot-to-lot has made it the most simple and economical option for planarization.
The multi-patented features of the coat area contributes greatly to the system's success. A patented nozzle sealing system, cup design and selfcleaning dispense nozzle all work in unison to control evaporation of chemical and thereby reduce the contamination which can be caused by crystallization of SiO2 particles. The dispense features also greatly reduce viscosity changes in the SOG/SOD chemical which are known to negatively affect coating uniformity. Temperature and humidity control hoods can further control spin conditions by providing the optimum environment for SOG/SOD processing and thus improve yields, repeatability and uniformity.
Multi-unit hotplates, contact or proximity bake, control curing temperature up to 350°C.
